AMAT 0010-28715 300mm HTR MCA SST Heater Purge Ring

Description

The AMAT 0010-28715 is a high-performance heater produced by Applied Materials, primarily used for temperature control in Electrostatic Chuck (ESC) systems during semiconductor manufacturing.

Features

• Precise Temperature Control: Allows accurate temperature regulation of the ESC within a set range, ensuring stability and reliability in the semiconductor manufacturing process.
• High-Temperature Tolerance: Capable of withstanding temperatures up to 300°C, accommodating various semiconductor manufacturing processes.
• Uniform Heating: Designed to provide even temperature distribution across the heater surface, preventing process defects caused by temperature inconsistencies.
• Long Lifespan: Made from high-temperature resistant materials, offering extended service life and reducing maintenance costs.
• Broad Compatibility: Compatible with various models of Applied Materials' Electrostatic Chucks.

Applications

• Wafer Processing: Controls the temperature of the Electrostatic Chuck during etching, deposition, and lithography processes, ensuring process stability and product quality.
• Research and Development: Provides precise temperature control environments for semiconductor material and device development.
• High-Volume Production: Maintains process consistency and improves production efficiency in high-yield semiconductor manufacturing facilities.